DATA FORMAT
1.) MOS, including BI-CMOS integrated circuits :
* Subdivided in 7 line widths
< 0.7 µm to > = 0.4 µm
< 0.4 µm to > = 0.3 µm
< 0.3 µm to > = 0.2 µm
< 0.2 µm to > = 0.16 µm
< 0.16 µm to > = 0.12 µm
< 0.12 µm to > = 0.08 µm
< 0.08 µm
* Also subdivided in 3 wafer sizes
< 200 mm
200 mm
300 mm
* Separate identification of MOS foundry wafers
2.) Bipolar integrated circuits, no subdivisions
3.) Discrete semiconductors, MOS and bipolar, no subdivisions
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